JPH0314146U - - Google Patents
Info
- Publication number
- JPH0314146U JPH0314146U JP7480289U JP7480289U JPH0314146U JP H0314146 U JPH0314146 U JP H0314146U JP 7480289 U JP7480289 U JP 7480289U JP 7480289 U JP7480289 U JP 7480289U JP H0314146 U JPH0314146 U JP H0314146U
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- vapor deposition
- correction means
- back sides
- posture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7480289U JPH069013Y2 (ja) | 1989-06-26 | 1989-06-26 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7480289U JPH069013Y2 (ja) | 1989-06-26 | 1989-06-26 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0314146U true JPH0314146U (en]) | 1991-02-13 |
| JPH069013Y2 JPH069013Y2 (ja) | 1994-03-09 |
Family
ID=31614816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7480289U Expired - Lifetime JPH069013Y2 (ja) | 1989-06-26 | 1989-06-26 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069013Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006312765A (ja) * | 2005-05-09 | 2006-11-16 | Fujinon Sano Kk | 真空蒸着装置 |
-
1989
- 1989-06-26 JP JP7480289U patent/JPH069013Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006312765A (ja) * | 2005-05-09 | 2006-11-16 | Fujinon Sano Kk | 真空蒸着装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069013Y2 (ja) | 1994-03-09 |
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